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利用灯丝热解CVD方法合成了厚度为100μm以上的金刚石多晶薄膜。气相合成的金刚石膜按照2mm×2mm×0.1mm尺寸切割后,通过表面真空蒸镀Ti、Pt、Au包层,在一定的温度下通过烧结等方法使金刚石膜表面金属化,实现了金刚石膜热沉的制备。在GaAs/AlGaAs激光列阵二极管的散热中使用了金刚石膜热沉,结果表明该激光器的散热特性得到了初步的改善,激光器的最大光输出功率较铜热沉散热时提高了10％左右。
A diamond polycrystalline thin film with a thickness of 100μm or more was synthesized by pyrolytic CVD method. After the vapor-phase diamond film was cut into a size of 2 mm × 2 mm × 0.1 mm, the surface of the diamond film was vacuum-deposited with Ti, Pt and Au clad layers and the surface of the diamond film was metallized by sintering at a constant temperature to obtain a diamond film heat Preparation of Shen. The diamond film heatsink was used in the heat dissipation of the GaAs / AlGaAs LDs. The results show that the heat dissipation characteristics of the LDs have been improved preliminarily. The maximum output power of the LDs is about 10% higher than that of the heat sinks.