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在平行平板类元件透射波前的测量过程中,在干涉强度图上有时会产生寄生条纹,会给透射波前的测量引入较大的误差。阐述了寄生条纹的产生机理,仿真分析了寄生条纹对透射波前测量误差的影响,介绍了调节移除寄生条纹的方法。对一平板类透射元件进行了实验对比,分别测量了在具有寄生条纹时和移除寄生条纹后的透射波前。根据对比结果可以看出,该调节方法能有效地消除寄生条纹对透射波前测量的影响,使测量结果能更真实地反应出元件透射波前的分布。
During the transmission of the wavefront of a parallel plate-like component, parasitic fringes sometimes occur on the interference intensity map, which introduces large errors in the measurement of the transmitted wavefront. The generation mechanism of parasitic streaks is expounded. The influence of parasitic streaks on the measurement error of transmitted wave front is simulated. The method of adjusting and removing parasitic streaks is introduced. An experimental comparison of flat plate-like transmissive elements was carried out, and the transmitted wavefront was measured separately with and without parasitic stripes. According to the comparison results, it can be seen that the adjustment method can effectively eliminate the influence of the parasitic fringes on the transmission wavefront measurement, so that the measurement result can more faithfully reflect the distribution of the transmitted wavefront of the component.