最近十年中,无论是国外或国内,表面分析都得到了迅速的发展,而离子束蚀刻技术已成为一种表面元素组成的深度剖析和固体界面分析的方法.但是离子轰击的溅射速率常常不稳定,界面分析的分辨率也不易选到最佳状态.通过使用标准参考材料,不仅可以校准溅射速率和蚀刻深度,而且还可以 In recent ten years, surface analysis has been rapidly developed both in foreign countries and in China, and ion beam etching technology has become a method of depth analysis and solid interface analysis of surface elements.But the ion bombardment sputtering rate often Instability, interface analysis of the resolution is not easy to choose the best state by using a standard reference material, not only to calibrate the sputtering rate and etching depth, but also