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在863“九五”计划期间,我们研制成功“计算机编程控制CVD金刚石膜生长系统”,并用此设备在无人值守的情况下,生长出毫米级金刚石和金刚石/硅碳氮多层膜,证明该设备安全可靠,性能优良。1 计算机编程控制CVD金刚石膜生长系统 图1(见封1)为我们研制的计算机编程控制CVD金刚石
During the 863 Ninth Five-Year Plan period, we successfully developed the “Computer-Programmed CVD Diamond Film Growth System” and used it to grow millimeter-level diamond and diamond / silicon carbonitride multilayer films unmanned to prove that The device is safe, good performance. 1 computer program control CVD diamond film growth system Figure 1 (see seal 1) for our computer-controlled programming CVD diamond