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精密微位移工作台系统是实现亚微米级定位精度的关键技术。文中推导出柔性铰 键在Ｒ≤ｔ条件下的理论设计公式，用该理论设计并研制了亚微米弹性微位移工作台及 其闭环控制系统，实验结果表明分辨率优于 ０．０１ μｍ，定位精度达±０．０３ｕｍ．满足亚 微米级定位精度的要求，从而证明了设计理论与实践相符。
Precision micro-displacement table system is to achieve sub-micron positioning accuracy of the key technologies. In this paper, the theoretical design formula of flexible hinge under R≤t is deduced. The submicron elastic micro-displacement table and its closed-loop control system are designed and developed by this theory. The experimental results show that the resolution is better than 0.01 μm, Accuracy of ± 0.03um. Meet the requirements of sub-micron positioning accuracy, which proves that the design theory and practice.