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简述了目前一些贵金属纳米颗粒催化刻蚀Si表面微纳结构的研究工作,并叙述了催化刻蚀反应的主要过程。在系统介绍催化刻蚀化学反应机理的基础上,对催化刻蚀的阴极、阳极反应进行了细致的探讨。根据不同的阳极和阴极反应方程式,讨论了不同的中间产物以及不同中间产物在反应中的作用机理。然后介绍了贵金属纳米颗粒的物理法和化学法两种制备方法。结合目前国内外研究进展,讨论了贵金属纳米颗粒种类、尺寸以及溶液成分比例对硅表面微纳结构的影响。最后对贵金属纳米颗粒催化刻蚀硅表面微纳陷光结构的未来前景进行了展望。
At present, some research work on the catalytic etching of the surface micro-nano structure of some noble metal nanoparticles is briefly described, and the main process of catalytic etching reaction is described. Based on the systematic introduction of the chemical reaction mechanism of catalytic etching, the cathodic and anodic reactions of catalytic etching are discussed in detail. According to different anode and cathode reaction equations, the different intermediate products and the reaction mechanism of different intermediates are discussed. Then introduced the physical and chemical methods of precious metal nanoparticles two preparation methods. Combined with the current research progress at home and abroad, the effects of the types and sizes of noble metal nanoparticles and the ratio of solution components on the micro / nano structure of silicon surface are discussed. Finally, the prospect of the catalytic activity of noble metal nanoparticles on the micro-nano-structure of silicon surface is prospected.