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本文介绍一种高纯PF_3气体的简易制作方法。给出所研制的PF_3气体在L1-2离子注入机上质谱分析的结果以及工艺试验结果。结果表明可供各类离子注入机、尤其冷阴极离子源的注入机掺磷使用。
This article describes a simple high-purity PF_3 gas production methods. The results of mass spectrometry analysis and process test of PF_3 gas developed on L1-2 ion implanter were given. The results show that various types of ion implanters can be used, especially for cold cathode ion source implants.