Electron paramagnetic resonance characterization of aluminum ion implantation-induced defects in 4H-

来源 :纳米技术与精密工程(英文) | 被引量 : 0次 | 上传用户:nikaixinma
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
Deep-level defects in silicon carbide (SiC) are critical to the control of the performance of SiC electron devices. In this paper, deep-level defects in aluminum ion-implanted 4H-SiC after high-temperature annealing were studied using electron paramagnetic resonance (EPR) spectroscopy at temperatures of 77 K and 123 K under different il-lumination conditions. Results showed that the main defect in aluminum ion-implanted 4H-SiC was the posi-tively charged carbon vacancy (VC ), and the higher the doping concentration was, the higher was the concentration of VC . It was found that the type of material defect was independent of the doping concentration, although more VC defects were detected during photoexcitation and at lower temperatures. These results should be helpful in the fundamental research of p-type 4H-SiC fabrication in accordance with functional device development.
其他文献
来自四届“全美最佳医生”得主所著的《多彩膳食健康全解码》的指导2010年已经到来,在这新的一年中让我们吃出一个新的自己!这需要我们有汲取正确新信息的能力,还要有使用这
不久前,国务院常务会议确定深化改革加快发展养老服务业的任务措施。着力推动养老服务业成为积极应对人口老龄化、保障和改善民生的重要举措,成为扩大内需、增加就业、促进服务
A novel test structure to characterize the fracture strength of MEMS (Micro-electro-Mechanical Systems) thin films is presented. The test structure is comprised
来,明天来说再等等;也不能“和稀泥”,各打五十大板完事。更不能混淆是非,颠倒黑白,欺软怕硬,助纣为虐,寒了老百姓的心,损害了党和政府的形象。
时下,不少领导干部热衷于组团到外地学习先进经验,以求创新突破,为本地工作添活力。然而,不少“学成归来”者对外地先进经验不加“消化”地简单“拿来”,在大刀阔斧的“改革”后,不
列宁在主持人民委员会议时经常使用这样的开会方法:(1)只请与讨论问题有关的人员出席会议。(2)在向会议提交议题时,必须同时附带以下材料:对议题的简要说明;拟定好的人民委员会决议的
听取意见、查摆问题,是教育实践活动的重要环节。自活动开展以来,当着面说、座谈会上提、意见表上填、互联网上讲,通过这些形式,各种意见正不断汇集起来,成为领导机关、领导干部查
岁月不居,时节如流.转瞬间,《中共南昌市委党校学报(以下简称《学报》)在接续奋斗中迎来了一百期.2003年 5月,《学报》创刊公开发行,成为全省地市级党校唯一公开刊物.在一百
期刊
作为艺术的美术学科确实可以给正在成长的孩子们带来美的享受和思想的愉悦.美术本身就给人以快乐和享受,而在美术课堂教学中得到快乐和享受的主体是学生.因此,作为教育者在美
The output displacement of the traditional symmetrical microgripper is large, but its micro-components or parts are easily damaged due to the uneven force exert