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Excellent epitaxial growth of supercon-ducting YBa_2 Cu_3 O_(7-x) thin films have beenrealized on(100)SrTiO_3 and(100)ZrO_2substrates by a planar rf or DC-magnetronsputtering apparatus with UHV system.Thequality of growth and the epitaxial orientationof the film strongly depended on substratetemperature,the substrate orientation and ox-ygen partial pressure.The films exhibitedsuperconducting onset at 92K and zero resist-ance at 90K with critical current density of
Excellent epitaxial growth of superconducting YBa_2Cu_3O_ (7-x) thin films have beenrealized on (100) SrTiO_3 and (100) ZrO_2substrates by a planar rf or DC-magnetronsputtering apparatus with UHV system.The quality of growth and the epitaxial orientation of the film strongly depended on substrate temperature, the substrate orientation and ox-ygen partial pressure. The films showing superconducting onset at 92K and zero resist-ance at 90K with critical current density of