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对长轴为12μm、短轴为10μm并在长轴处直连2μm宽输出波导的椭圆微盘激光器的热特性进行了实验和理论分析。测量连续电流注入微腔激光器的稳态特性,根据其波长红移计算器件热阻为ZT=0.846 K/m W。用有限元分析法计算椭圆微腔的热阻,理论与实验结果相吻合,热阻的最大偏差为5%。研究了微腔激光器衬底厚度对微腔有源区温度的影响,通过引入侧向散热机制有效改善了微腔激光器的热特性。
The thermal characteristics of an elliptical microdisk laser with a long axis of 12 μm, a short axis of 10 μm and a direct output waveguide with a length of 2 μm are analyzed experimentally and theoretically. The steady state characteristics of a continuous current injection microcavity laser were measured. The thermal resistance of the device was calculated as ZT = 0.846 K / mW based on its wavelength redshift. The thermal resistance of elliptical microcavity is calculated by finite element analysis. The theoretical and experimental results are in good agreement. The maximum deviation of thermal resistance is 5%. The influence of substrate thickness of microcavity laser on the temperature of microcavity active region was studied. The thermal performance of microcavity laser was effectively improved by introducing lateral heat dissipation mechanism.