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设计并搭建了一套基于CCD测量激光光束质量M2的系统。采用CCD测量激光光束在不同位置处的光束直径,通过非线性最小二乘法拟合测量数据获得光束腰斑直径和远场发散角,再通过公式计算得到激光光束质量M~2。利用本系统测量多组数据,并与专业M~2仪所测的数据进行对比,二者一致性较好,表明采用本实验装置测量激光光束质量M~2可以有效地替代M~2仪。
A set of system based on CCD to measure the laser beam quality M2 was designed and built. Using CCD to measure the beam diameter of the laser beam at different positions, the beam waist spot diameter and the far-field divergence angle can be obtained by fitting the measured data by the nonlinear least square method, and the laser beam quality M ~ 2 can be calculated by the formula. Using this system to measure multiple sets of data and compare them with the data measured by a professional M ~ 2 instrument, the consistency between the two is good, which shows that M ~ 2 can be effectively replaced by measuring the laser beam quality M ~ 2 by using the experimental apparatus.