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平板显示屏的经济生产，不仅要求可靠的工艺技术，而且绝对要求较高的靶利用率。本文介绍了在保持ＩＴＯ工艺的标准阴极法所获得的膜特性基础上，用移动磁场的方法可以获得＞５０％的靶利用率。
The economic production of flat panel displays requires not only reliable process technology but absolutely high target utilization. This article describes the use of a moving magnetic field method to achieve> 50% target utilization based on the properties of the membrane obtained from the standard cathode method of ITO technology.