一、前言 在利用气体放电实际应用的离子镀设备中,把等离子源(阴极和中间电极)安装在真空容器侧面,使水平地发射等离子流在坩埚正上方偏转,自然符合重力规则。在等离子偏转的同时,必须满足下列条件: 1.等离子流应在坩埚上方聚束,大部分的放电功率应集中(这对于熔化和蒸发碎片的 I. INTRODUCTION In ion plating equipment that is practically used for gas discharge, the plasma source (cathode and middle electrode) is installed on the side of a vacuum vessel to horizontally emit the plasma stream and deflect directly above the crucible, which naturally meets the rules of gravity. While the plasma is deflected, the following conditions must be met: 1. The plasma flow should be focused over the crucible and most of the discharge power should be concentrated (which is important for melting and evaporating debris