在超高真空分压测量中,为了提高检测灵敏度,通常选用电子倍增器作为离子收集。常用的电子倍增器有瓦片型和管型两种。瓦片型倍增器可耐大信号轰击,适用于超高真空测量,而管型倍增器具有增益高、噪音低的特点,适用于极高真空测量。在本实验中,我们采用了13级Be-Cu电子倍增器,分别在杆长为80毫米和30毫米的 In the ultra-high vacuum partial pressure measurement, in order to improve the detection sensitivity, the electron multiplier is usually selected as the ion collection. Commonly used electron multiplier tile and tube type two. Tile-type multiplier can withstand large signal bombardment, suitable for ultra-high vacuum measurement, and tube multiplier with high gain, low noise, suitable for very high vacuum measurements. In this experiment, we used a 13 Be-Cu electron multiplier, respectively, in the rod length of 80 mm and 30 mm