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一、引言众所周知、非晶态金属除了具有优良的磁性能外,还有高强度(σ_b:250～400kg/mm~2)、高电阻(ρ:120～190μΩ—Cm)以及耐腐蚀等特性,加之其形状细(丝)、薄(带),就有可能制作动态性能好,灵敏度高,对应力和温度不敏感,可靠性高的微型磁性传感器,这种高性能传感器恰恰是研制高级轿车、工业机器人、马达起动系统以及测量仪器的关键技术,而通常的晶态金属、半导体或铁电材料是难以满足上述器件对传感器苛刻的要求的。如感应马达所用磁通传感器要求有以下特性;
I. INTRODUCTION As we all know, in addition to the amorphous metal has excellent magnetic properties, but also high strength (σ_b: 250 ~ 400kg / mm ~ 2), high resistance (ρ: 120 ~ 190μΩ-Cm) and corrosion- Coupled with its fine shape (silk), thin (band), it is possible to produce dynamic performance, high sensitivity, stress and temperature insensitive, high reliability of micro-magnetic sensors, high-performance sensor is precisely the development of high-class cars, Industrial robots, motor start-up systems and measuring instruments, and the usual crystalline metal, semiconductor or ferroelectric materials are difficult to meet the demanding requirements of these devices on the sensor. If the induction motor flux sensor used for the following requirements;