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利用Ｈ－８００透射电镜和Ｄｍａｘ／ｒｂ旋转阳极Ｘ－射线衍射仪分析了化学镀Ｃｏ－Ｎｉ－Ｐ三元合金薄膜的组织结构，并采用原子力显微镜观察了镀层的表面生长形貌，探讨了其生长机理。结果表明，随镀液中［Ｃｏ２＋］／［Ｃｏ２＋］＋［Ｎｉ２＋］的增大，镀层中Ｃｏ含量相应增加，Ｎｉ和Ｐ含量则下降。当Ｃｏ－Ｎｉ－Ｐ镀层中Ｐ含量小于５．０％时，镀层为晶态，且晶粒随着镀层的增厚而长大。随Ｎｉ和Ｐ含量的增高，镀层向非晶结构过渡；当Ｐ含量大于６．５％时，镀层经很薄的微晶过渡区后很快以非晶结构生长；当镀层含磷量处于５．０％～６．５％过渡区时，初期镀层为１２０ｎｍ左右的微晶，厚度增加时，晶粒尺寸迅速减小。
The microstructure of electroless Co-Ni-P ternary alloy film was analyzed by H-800 transmission electron microscopy and Dmax / rb rotating anode X-ray diffractometer. The surface morphology of the coating was observed by atomic force microscopy. Growth mechanism. The results show that with the increase of [Co2 +] / [Co2 +] + [Ni2 +] in the bath, the content of Co increases and the content of Ni and P decreases. When the content of P in the Co-Ni-P coating is less than 5.0%, the coating is crystalline and the grains grow as the coating thickens. With the content of Ni and P increased, the coating transitioned to the amorphous structure. When the content of P was more than 6.5%, the coating grew rapidly with amorphous structure after the thin crystallite transition zone. When the phosphorus content in the coating was at 5 .0% ~ 6.5% transition zone, the initial coating of about 120nm crystallites, the thickness increases, the grain size decreases rapidly.