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作为高压、特高压领域几乎唯一的绝缘和灭弧介质,SF6的泄漏对电力设备的安全运行和电力系统的稳定可靠造成威胁,而且还会造成人员伤害和大气污染的恶性后果。因此,电力设备对电气设备中SF6气体泄漏的监测必不可少。主要阐述基于负电晕放电原理的SF6传感器的基本原理、器件结构及性能;分析基于MEMS技术的微型SF6传感器的发展现状;设计制备MEMS SF6基本原理传感器的硅基微电极阵列,其中硅尖阵列间距为55μm,高度约为16μm,顶端曲率半径约为150 nm。基于以上微电极阵列组装负电晕放电器件并测试其伏安特性,验证其电晕放电趋势,可用于SF6气体检测。
As the only insulating and arc-extinguishing medium in the field of high-voltage and extra-high voltage, the leakage of SF6 poses a threat to the safe operation of power equipment and the stability of the power system, as well as the vicious consequences of personal injuries and atmospheric pollution. Therefore, the monitoring of SF6 gas leakage in electrical equipment by electrical equipment is essential. The basic principle, device structure and performance of the SF6 sensor based on the principle of negative corona discharge are mainly described. The development status of the miniature SF6 sensor based on MEMS technology is analyzed. The silicon-based microelectrode array based on MEMS SF6 sensor is designed and fabricated. 55 μm, a height of about 16 μm and a tip radius of curvature of about 150 nm. Based on the assembly of the above microelectrode array negative corona discharge device and test its volt-ampere characteristics to verify the trend of corona discharge can be used for SF6 gas detection.