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在多孔Si上使用不同催化剂成功生长ZnO纳米结构。结果表明,Au作催化剂在Si衬底上得到末端呈六角形的ZnO纳米棒,Cu作催化剂在Si(100)和(111)分别上生长出带状和棒状纳米ZnO,Zn作催化剂在Si衬底上则获得ZnO纳米线。Zn催化制备的ZnO纳米线晶面间距为0.283nm,生长方向是[0110],具有结晶较好的六角纤锌矿晶体结构。比较了不同催化剂制备ZnO的光学性能,发现得到Zn催化制备的ZnO纳米线缺陷绿光峰最弱,因此Zn催化生长制备的纳米ZnO结构质量较好。空气中退火后,3种催化剂生长的纳米ZnO的缺陷发光峰位置不变,而强度变弱。
ZnO nanostructures were successfully grown on porous Si using different catalysts. The results show that ZnO as a catalyst on the Si substrate hexagonal ZnO nanorods, Cu as a catalyst on the Si (100) and (111) were grown on the ribbon and rod-shaped nano ZnO, Zn as a catalyst in the Si lining On the bottom is obtained ZnO nanowires. The ZnO nanowire crystal lattice spacing prepared by Zn catalysis is 0.283nm, and the growth direction is [0110], which has the crystal structure of hexagonal wurtzite with good crystallinity. The optical properties of ZnO prepared by different catalysts were compared. It was found that the green peak of ZnO nanowires with the defects of Zn catalysis was the weakest. Therefore, the structure of ZnO nanostructured by Zn catalysis was better. After annealed in air, the defect emission luminescence peaks of the three kinds of ZnO grown by the three catalysts were unchanged, but their intensities were weaker.