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在溶胶 凝胶基础上 ,采用碱 /酸两步法和浸渍镀膜技术制备出纳米多孔SiO2 薄膜 ,并将该薄膜在空气和氨气与水蒸气的混合气体中热处理。使用透射电子显微镜、原子力显微镜、傅立叶红外光谱仪、椭偏仪、分光光度计等分析了薄膜的特性。实验结果表明 :采用碱 /酸两步催化法能够明显提高纳米多孔SiO2 光学增透薄膜的力学特性 ,混合气体中的热处理又使其力学性能得到进一步改善。薄膜耐磨等力学性能增强归因于SiO2 颗粒间更多的化学键合。在力学性能增强的同时 ,薄膜折射率仍保持约 1 2 4的较低值 ,光学增透效果良好 ,透射率≥ 99 5 %。
On the basis of sol-gel, nano-porous SiO2 film was prepared by alkali-acid two-step method and dip-coating technology, and the film was heat-treated in air and mixed gas of ammonia and water vapor. The properties of the films were analyzed using transmission electron microscopy, atomic force microscopy, Fourier transform infrared spectroscopy, ellipsometry, spectrophotometry and the like. The experimental results show that the mechanical properties of nano-porous SiO2 optical anti-reflective coatings can be obviously improved by using the two-step alkali-acid method. The heat treatment in the mixed gas can further improve the mechanical properties. The enhanced mechanical properties such as wear resistance of the film are attributed to more chemical bonding between the SiO2 particles. While the mechanical properties are enhanced, the refractive index of the film remains at a relatively low value of about 120, and the optical antireflection effect is good with a transmittance of 99 5%.