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离子注入材料表面优化技术首先是由氮离子注入改善金属材料表面耐磨性开始的,其研究开发和工业应用已有近20年的历史。此技术在许多领域得到成功的应用,受到许多国家的高度重视。 80年代以来,金属元素(如Ti、Zr、V、Nb、Mo等过渡金属和Y、Ce等稀土金属)离子注入材料表面优化研究将此技术推进到一个新阶段。已经取得的研究和应用结果表明,金属离子注入可以综合地改善材料表面的多种性能,如耐磨、润滑、耐蚀、抗疲劳等,比氮离子注入的表面改性效果更加有效,其应用范围也更广泛。 金属离子注入材料表面优化技术的基本过程和工作原理,概括地说就是一台离子注入机产生100keV量级能量的离子束,再将载能的离子束打到需要优化处理的材料表面,引起材料表面层内成分、结构和性能的变化,以改善材料表面的耐磨、润滑、耐蚀、抗疲劳等性能。
Ion implantation material surface optimization technology is first introduced by nitrogen ion implantation to improve the wear resistance of the metal surface began its research and development and industrial applications for nearly 20 years of history. This technique has been successfully applied in many fields and is highly valued by many countries. Since the 1980s, optimization of the surface of metal ion implantation materials such as transition metals such as Ti, Zr, V, Nb, Mo and rare earth metals such as Y and Ce has pushed this technology to a new stage. The research and application results that have been obtained show that metal ion implantation can comprehensively improve various properties of the surface of the material such as wear resistance, lubrication, corrosion resistance, fatigue resistance and the like, and is more effective than the surface modification effect of nitrogen ion implantation. The application thereof A wider range. Metal ion implantation material surface optimization technology, the basic process and working principle, in general, is an ion implanter ion beam generated on the order of 100keV energy, and then load the ion beam hit the need to optimize the surface of the material, causing the material Surface layer composition, structure and performance changes, to improve the material surface wear, lubrication, corrosion resistance, fatigue and other properties.