在92年12月2～4日于日本举办的“Semicon/Japan’92”展览会上,日本NIKON和Canon两家公司分别推出了采用变形照明光源的新型片子步进机。 NIKON公司展出的NSR-2005i9C型样机、采用了数值孔径NA为0.57的i线5倍缩小镜头,视场尺寸为22×22平方毫米(17.9×25.2mm),分辨率优于0.45微米,当采用SHRING变形照明光源后,分辨率可达0.35微米。分辨率R为0.40微米时,焦深DOF为2微米。该机的总套刻精度优于0.1微米,(|(?)|+3σ),可适用于16MDRAM的批量生产和64M DRAM的小批量试制。 Canon公司展出的FPA-2500i3型样机,采用了数值孔径NA为0.60的i线5倍缩小 At the “Semicon / Japan’92” exhibition held in Japan on December 2-4, 1992, Nippon Nikon and Canon each introduced a new type of film stepping machine using a deformable lighting source. The NIKON NSR-2005i9C prototype uses an i-line 5x reduction in numerical aperture NA of 0.57 with a field of view of 22 x 22 mm2 (17.9 x 25.2 mm) with resolution better than 0.45 m SHRING deformation illumination light source, the resolution of up to 0.35 microns. When the resolution R is 0.40 μm, the depth of focus DOF ​​is 2 μm. The machine’s total nesting accuracy of better than 0.1 microns, (| (?) | + 3σ), suitable for 16MDRAM mass production and 64M DRAM small batch trial. The FPA-2500i3 prototype exhibited by Canon has been scaled down by 5 times the i-line with a numerical aperture NA of 0.60