为了保证真空设备的密封性,满足漏气率要求。O形圈真空密封设计计算必须正确选择O型密封圈材料和尺寸,正确设计密封槽尺寸和密封力。而任何气体的漏率可用Roth公式求出,即: 托·升/秒(1)式中Q──漏率 T一绝对温度,K M──分子量 R一垫圈密封系数 L──O型图接触长度,cm A一密 In order to ensure the vacuum sealing equipment to meet the leakage rate requirements. O-ring vacuum seal design calculations must be the correct choice of O-ring material and size, the correct design of seal groove size and sealing force. The leakage rate of any gas can be calculated using the Roth formula, that is: Torr · L / s (1) where Q ─ ​​─ leak rate T an absolute temperature, KM ─ ─ molecular weight R a gasket seal factor L ─ ─ O-type figure contact Length, cm A a dense