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纳米薄膜与基体之间的界面热输运是MEMS系统热管理和热设计的热点和难点。建立了频率扫描3ω法的热阻抗网络模型。利用频率-电流扫描3ω法和不同厚度薄膜试样得到单层纳米薄膜与基体之间的界面热阻。ZrO_2、SiO_2增透膜与基体之间的界面热阻分别为0.108 m~2·K·MW~(-1)和0.066 m~2·K·MW~(-1)。发现界面热阻与扫描频率无关,未发现界面热阻随膜厚变化的尺度效应。实验和理论分析表明,声子近界面效应在增透膜和基体界面的热输运过程中起主导作用。
The heat transfer between the nanofilm and the substrate is a hot and difficult issue in thermal management and thermal design of MEMS. Established a frequency sweep 3ω method of thermal impedance network model. The interfacial thermal resistance between single-layer nanofilm and matrix was obtained by frequency-current scanning 3ω method and different thickness thin film samples. The thermal interface resistances of ZrO_2 and SiO_2 antireflection coatings and substrates were 0.108 m 2 · K · MW -1 and 0.066 m 2 · K · MW -1, respectively. It is found that the thermal resistance of the interface has nothing to do with the scanning frequency, and the scale effect of the interface thermal resistance with the thickness change is not found. Experiments and theoretical analyzes show that the near-interface effect of phonons plays a dominant role in the heat transport process between the AR coating and the substrate interface.