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本文首先通过Al-Si合金化过程的讨论,揭示了工艺中影响良好欧姆结形成的主要原因是接触窗口中自然氧化膜的存在,进而分析蒸铝工艺对该膜所潜在的减薄作用的机理,最后提出通过蒸铝工艺的控制来实现欧姆结的良好接触和防止尖角(Spear)出现的工艺方法.
This paper first discusses the Al-Si alloying process and reveals that the main reason for the effect of the formation of ohmic junction in the process is the existence of natural oxide film in the contact window and the mechanism of the potential thinning action of the steaming aluminum process on the film Finally, the control method of the aluminum evaporation process is proposed to realize the good contact of the ohmic junction and the method of preventing the occurrence of the sharp corners.