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高T_c超导材料的实用化和超导电子学的进展,在很大程度上取决于超导薄膜技术的突破,因此国内外正广泛而深入地开展薄膜生长方法,薄膜结构和特性的研究。华中理工大学光学系薄膜实验室和激光技术国家重点实验室利用射频溅射技术,电子束蒸发技术和激光蒸发技术分别在ZrO_2和SrTiO_3等衬底上制备Y-Ba-Cu-O薄膜获初步成果。
The practical application of high-T superconducting materials and the progress of superconducting electronics depend largely on the breakthrough of superconducting thin films. Therefore, the research on thin-film growth methods, thin-film structures and properties is extensively and deeply carried out at home and abroad. Y-Ba-Cu-O thin films were prepared on ZrO_2 and SrTiO_3 substrates by radio frequency sputtering, electron beam evaporation and laser evaporation, respectively, according to the preliminary results obtained from the Thin Film Lab and the State Key Laboratory of Laser Technology, Huazhong University of Science and Technology .