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利用中频脉冲非平衡磁控溅射技术在载玻片上制备了类金刚石(DLC)薄膜,研究了沉积气压对薄膜厚度、微观结构、机械性能和光学性能的影响。厚度测试结果表明,DLC膜厚度随沉积气压的增加而增加。X射线光电子能谱测试结果表明,当沉积气压由0.18Pa增加到1.50Pa时,DLC薄膜中sp~3杂化碳含量随沉积气压的增加而减少。纳米压痕和椭偏仪测试结果表明,DLC膜的纳米硬度、折射率均随沉积气压的增加而减小。采用浅注入模型分析了沉积气压对薄膜生长和键合结构的影响。以上结果表明,沉积气压对DLC膜的厚度、sp~3杂化碳含量、机械与光学性能具有较大的影响。
Diamond-like carbon (DLC) films were prepared on glass slides by IF pulsed unbalance magnetron sputtering and the effects of deposition pressure on film thickness, microstructure, mechanical properties and optical properties were studied. Thickness test results show that, DLC film thickness increases with the deposition pressure increases. X-ray photoelectron spectroscopy test results show that when the deposition pressure increases from 0.18Pa to 1.50Pa, the DLC film sp ~ 3 hybrid carbon content decreases with the increase of deposition pressure. The results of nanoindentation and ellipsometry show that the nanohardness and refractive index of DLC films decrease with the increase of deposition pressure. The shallow injection model was used to analyze the effect of deposition pressure on the film growth and bonding structure. The above results show that the deposition pressure on DLC film thickness, sp ~ 3 hybrid carbon content, mechanical and optical properties have a greater impact.