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采用多弧离子镀技术沉积氮化钛铝超硬反应膜。考查了沉积工艺参数对膜层组织表面形态的影响 ,进行了显微硬度测定分析及膜层耐磨性实验 ,确定了氮化钛铝超硬反应膜的最佳沉积工艺。
Multi-arc ion plating technique was used to deposit superhard titanium aluminum nitride reaction film. The influence of deposition parameters on the surface morphology of the film was investigated. The microhardness of the film was measured and the wear resistance of the film was tested. The best deposition technology of the superhard titanium nitride film was determined.