引言 膜基界面间的附着强度是表征镀膜质量的重要指标。影响膜附着强度的因素较多,内因有膜基界面间的附着力,膜的应力;外因有潮湿气氛、油及灰尘污染,基片镀前处理及成膜时基片温度,蒸发源蒸发速率及蒸发温度,成膜后的工艺处理等。本文侧重从机理上分析影响膜附着强度的各种因 Introduction The adhesion strength between the film-based interface is an important indicator of coating quality. There are many factors that affect the adhesion strength of the film. The internal factors are the adhesion between the film-based interface and the stress of the film. The external factors are the humid atmosphere, oil and dust pollution, substrate pretreatment and substrate temperature, evaporation rate And evaporation temperature, after the film processing and so on. This article focuses on the mechanistic analysis of the factors that affect the adhesion strength of the membrane