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为实现对环境温度的高分辨率、快速、准确测量,设计制作了一种基于光学读出的微悬臂梁温度传感器。由于组成微悬臂梁的两种材料金和氮化硅热膨胀系数的差异,在温度变化时,梁内部会产生热应力导致其弯曲变形。不同温度下梁的弯曲变形量不同,利用光杠杆方法检测出此变形,经标定后就能实现环境温度的准确测量。实验中设定系统光臂长度为25mm,采用商业化三角形微悬臂梁(长200μm、宽40μm、氮化硅层厚0.6μm,金层厚60nm)对传感器进行了测试,实验结果显示其测量重复性好,温度分辨率达到0.02℃。对于特定尺寸的微悬臂梁,通过优化其双材料厚度比,温度分辨率可达10-4℃,可用于环境温度的精密测量。
In order to achieve high resolution, fast and accurate measurement of ambient temperature, a micro-cantilever temperature sensor based on optical readout was designed. Due to the difference between the thermal expansion coefficients of gold and silicon nitride in the two materials constituting the micro-cantilever, when the temperature changes, thermal stress will be generated inside the beam to cause the bending deformation. Bending deformation of beams at different temperatures is different, the use of optical lever method to detect this deformation, the calibration can be achieved after the accurate measurement of ambient temperature. In the experiment, the length of the optical arm of the system was set at 25mm. The sensor was tested with a commercially available triangular micro-cantilever (length 200μm, width 40μm, thickness of silicon nitride layer 0.6μm, gold layer thickness 60nm). The experimental results show that the measurement repeats Good sex, temperature resolution of 0.02 ℃. For a specific size micro-cantilever, the temperature resolution of 10-4 ° C can be optimized for precise measurement of ambient temperature by optimizing its dual-material thickness ratio.