论文部分内容阅读
文中推导了对于给定膜系的特定膜层的厚度变化的灵敏度因子计算公式,并给出了用计算机对不同膜系的计算实例。分析了厚度灵敏度因子对膜系透射光谱的灵敏谱段、灵敏膜层等特性的影响规律,并由此给出了确定膜层厚度允差的方法
In this paper, we derive the formula of the sensitivity factor for the thickness change of a particular membrane layer for a given membrane system and give a computational example of different membrane systems using a computer. The influence of the thickness sensitivity factor on the sensitive spectrum of the transmission spectrum of the film system and the characteristics of the sensitive film is analyzed. The method of determining the film thickness tolerance is given