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用ＦＴＩＲ分析，结合ＤＳＣ、ＸＲＤ、ＡＦＭ实验结果，展示了ｓｏｌ－ｇｅｌ法制备ＢａｘＳｒ１－ｘＴｉＯ３（ＢＳＴ）薄膜热演化过程的化学机制．研究表明：螯合剂ＨＡＣＡＣ的引入减缓钛醇盐水解速率、改善晶化途径、降低结晶起始温度，从而制得了晶化完善、致密无裂纹的ＢＳＴ薄膜．
The chemical mechanism of thermal evolution of BaxSr1-xTiO3 (BST) thin films prepared by sol-gel method was demonstrated by FTIR analysis and DSC, XRD and AFM. The results showed that the introduction of chelating agent HACAC slowed down the hydrolysis rate of titanium alkoxide to improve the crystallization pathway and lower the crystallization onset temperature. Thus, a perfect crystallized and compact crack-free BST film was obtained.