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提出了一种提高夏克-哈特曼波前传感器光斑质心的定位精度算法,分析了光斑质心的探测误差,采用与光斑尺寸匹配的探测窗口及插值法提高了图像的分辨率,并使用二阶矩算法计算了质心位置。采用该算法对含有噪声的光斑图进行图像处理与计算,并给出了待测件的波前重构示意图。结果表明,相对于传统算法,该算法将质心的探测精度提高了约0.8倍。
A new algorithm to improve the positioning accuracy of the Shak-Hartmann wavefront centroid is proposed. The detection error of the centroid of the spot is analyzed. The detection window and the interpolation method are used to match the spot size to improve the resolution of the image. The order moment algorithm calculates the position of the centroid. The algorithm is used to process and calculate the speckle pattern with noises, and the schematic diagram of the wavefront reconstruction of the DUT is given. The results show that compared with the traditional algorithm, this algorithm improves the detection accuracy of centroid by about 0.8 times.