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报道了光学外差法测量表面起伏精度及横向分辨精度达到０．１１ｎｍ及４μｍ．本文采用的是完全共光路外差干涉系统，阐述了它的原理、构造及噪声的影响，并将测量结果与其它商品仪器测量结果作了比较．
It is reported that optical heterodyne method can measure surface undulation accuracy and lateral resolution accuracy to 0.11nm and 4μm. In this paper, a completely co-channel heterodyne interference system is used. Its principle, structure and noise influence are described. The measurement results are compared with those of other commercial instruments.