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本文描述了几种自平衡精密直流替代微波功率计的原理及其发展过程。着重介绍了中国计量科学研究院和国营8460厂联合研制的一种新型精密微波功率计的原理、测量方法、误差分析和实验结果。这种功率计在0.1～10mW的微波小功率测量范围内,总的准确度达到±(0.05％+0.2μW)。由于伺服系统的不完善特性所引入的自平衡环路的零失衡误差小于土0.01％,伺服系统的温源和噪声电平在0.1μW以下。此外这种功率计还可同时稳定微波讯号发生器的输出电平,并已获得优于0.01％/小时的微波功率稳定度。新型的微波功率计系采用四端电阻直接比较技术,全部采用固体电路。与惠斯登电桥比较,提高了测量准确度,减小了噪声,并且更加适用于自动测量系统。
This article describes several self-balancing precision DC substituting microwave power meter principle and its development process. The principle, measuring method, error analysis and experimental results of a new type of precision microwave power meter jointly developed by China Institute of Metrology and State-owned 8460 Factory are introduced emphatically. The power meter in the microwave 0.1 ~ 10mW low-power measurement range, the total accuracy of ± (0.05% +0.2 μW). Due to the imperfect characteristics of the servo system, the zero imbalance error of the self-balance loop is less than 0.01%, and the temperature and noise level of the servo system is below 0.1μW. In addition, this power meter can also stabilize the output level of the microwave signal generator, and has achieved better than 0.01% / hour microwave power stability. The new microwave power meter uses a four-terminal resistance direct comparison technology, all using solid-state circuits. Compared with the Wheatstone bridge, the measurement accuracy is improved, the noise is reduced, and the system is more suitable for automatic measurement.