The cluster target system was installed to the due position last year. Several test experiments such as the test of vacuum system, the calibration of the flux and the stability of system have been done after the installation and collimation of cluster internal target. However, there are two problems which hinder us from going further. One is the blocking of nozzle which results in the failure of a long-term system running; the other is the low pumping power for Hydrogen gases in the first stage of the cluster source cham- The cluster target system was installed to the due position last year. Several, there are the the test of vacuum system, the calibration of the flux and the stability of the system have been done after the installation and collimation of cluster internal target. However, there are two problems which hinder us from going further. One is the blocking of nozzle which results in the failure of a long-term system running; the other is the low pumping power for hydrogen gases in the first stage of the cluster source cham-