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本文用射频磁控溅射方法在片状c-BN晶体基底上生长了c-BN薄膜,显微拉曼光谱(μ-RS)和扫描电子显微镜(SEM)测试结果表明:沉积的薄膜是大约10μm厚、高结晶性、电子透明的高纯c-BN薄膜。岛状和层状生长模式在试验中清晰的展示出来。同时在生长的c-BN薄膜内部和被遮盖的基底部分上发现了籽晶。
In this paper, a c-BN thin film was grown on a c-BN crystal substrate by RF magnetron sputtering. The results of micro-Raman spectroscopy (μ-RS) and scanning electron microscopy (SEM) showed that the deposited film was about 10μm thick, high crystallinity, electron transparent high-purity c-BN film. Island and laminar growth patterns are clearly demonstrated in the experiment. Seed crystals were found both inside and part of the covered c-BN film grown.