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气囊数控抛光是近年来一种新兴的先进光学制造技术,采用柔性的气囊作为抛光工具并以进动的方式进行加工。首先简要阐述了气囊抛光的抛光原理,然后针对平面和曲面光学零件,在自行研制的气囊抛光实验样机上进行了抛光实验。被抛光光学元件的材料去除是在抛光区内实现的。研究了进动角、气囊压缩量、气囊内部压力、气囊转速、抛光时间以及工件的曲率半径几种重要的工艺参数对平面工件和球面工件抛光接触区大小和形状影响情况的异同。在此基础上,总结了气囊抛光材料去除的影响规律。给出了几种重要工艺参数在平面工件和球面工件上取值范围。
Airbag NC polishing is a new and advanced optical manufacturing technology in recent years. It uses flexible airbag as polishing tool and precession processing. First of all, the principle of polishing the airbag is briefly introduced. Then, the polishing experiments are carried out on the self-developed airbag polishing prototype for planar and curved optical components. Material removal of the polished optical element is accomplished within the polishing zone. The similarities and differences of several important process parameters such as precession angle, airbag compression, airbag internal pressure, airbag rotation speed, polishing time and workpiece radius of curvature on the size and shape of polished contact area between planar workpiece and spherical workpiece were studied. On this basis, summarizes the impact of airbag polishing material removal rules. Several important process parameters are given in the plane workpiece and spherical workpiece range of values.