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本文介绍一种金属静态膨胀法真空标准装置。文中详细地叙述了该装置的工作原理,参数测定和综合不确定度的分析方法。作者针对金属结构的特点,考虑到装置的“动态效应”,从理论上导出了实用的标准压强计算公式: P_(1n)=P_(10)+nKP_(30)+YT_n,其中: P_(1n)——n次膨胀后校准室的压强,Pa;n——膨胀次数,P_(30)——气源室压强,Pa;K——膨胀系数;P_(10)——校准室本底压强,Pa;Y——校准室升压率,Pa·s~(-1);T_n——膨胀n次所需的时间,S。同时,作者还对装置升压率的测定方法进行了实验研究,得出了明确的结论。最近,本装置经中国计量科学研究院实验认证,在1×lO~(-1) x 10~5Pa压强范围内测量误差不超过士2%,定为一等真空标准。
This article describes a metal static expansion method vacuum standard device. The article described in detail the working principle of the device, the determination of parameters and comprehensive analysis of the uncertainty. In view of the characteristics of metal structure, taking into account the “dynamic effect” of the device, a practical standard pressure calculation formula is derived theoretically: P_ (1n) = P_ (10) + nKP_ (30) + YT_n, ) - the pressure of the calibration chamber after n expansion, Pa; n - the number of expansion, P_ (30) - the pressure of the air source chamber, Pa; K - the expansion coefficient; P_ (10) , Pa; Y-- pressure increase rate of the calibration chamber, Pa · s ~ (-1); T_n - time required to expand n times, At the same time, the author also conducted an experimental study on the method for measuring the rate of device pressurization and reached a clear conclusion. Recently, this device has been verified by China National Institute of Metrology, and the measurement error does not exceed ± 2% in the pressure range of 1 × 10 ~ (-1) x 10 ~ 5Pa, which is defined as the first-class vacuum standard.