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纳米结构的高精度可控加工是制约器件小型化发展的重要限制因素之一,而基于透射电子显微镜的电子辐照有望在加工精度上推动纳米加工的进程.透射电子显微镜中高能电子束不仅能用于原子结构成像,还可用于原位辐照加工.因此,基于透射电子显微镜的电子辐照效应研究既有利于从原子尺度上探索材料在电子辐照作用下的结构稳定性及结构演变规律,又有利于加深对电子辐照过程的理解,为纳米结构的高精度可控加工提供理论依据和实验基础.本文将简要介绍几种常见的电子辐照效应,并综述近年来利用透射电子显微镜在石墨烯、氮化硼、过渡金属硫族化合物等二维层状材料原位辐照方面的研究进展,为进一步研究二维材料结构稳定性和精准、可控加工低维纳米结构提供参考.
High-precision controllable fabrication of nanostructures is one of the most important limiting factors in miniaturization of devices, and electron irradiation based on transmission electron microscopy is expected to promote the progress of nanomaterials in processing accuracy.High-energy electron beams in transmission electron microscopy For atomic structure imaging, but also for in-situ irradiation processing.Therefore, electron-based TEM study of electron irradiation is not only conducive to the material from the atomic scale to explore the structure of the material under the influence of electron irradiation and structural evolution of the law , But also conducive to deepen the understanding of the electron irradiation process for the nanoscale structure of high-precision controllable processing to provide a theoretical basis and experimental basis.This article will briefly introduce several common electron irradiation effects, and reviewed in recent years the use of transmission electron microscopy In-situ irradiation of two-dimensional layered materials such as graphene, boron nitride and transition metal chalcogenide is reviewed, which can provide references for further research on structural stability, precision and controllability of low-dimensional nanostructures.