测定微高作为图象传感器应用的例子,现介绍使用面阵传感器的测定器。(1)计测原理它是使用光切断法来测量表面高度的。原理是,当狭缝光倾斜地照射在测定面上时能得到光和被测面的交线,它与在同处切断被测物 Determination of micro-high As an example of image sensor applications, the introduction of the use of area array sensor measuring device. (1) Measurement principle It is the use of optical cutting method to measure the surface height. The principle is that when the slit light is obliquely irradiated on the measuring surface, the intersection of the light and the surface to be measured can be obtained. This is the same as cutting off the object to be measured