一、引言在X射线荧光分析中,激发源发出的初级射线与分析样品相互作用,发生光电效应,而使样品发射出某些特征X射线。除此之外,在样品的内部以及样品的承托物上还会产生弹性散射与非弹性散射。在这些散射过程中将产生大量的散射光子。散射光子的出现,一方面限制了探测器的计数率,从而影响特征X射线谱的收集。另一方面将加大待测X射线谱的本底计数,影响特征谱强度的定量检测。统计学的分析表明,在决定检测限的诸 I. INTRODUCTION In X-ray fluorescence analysis, the primary ray emitted by the excitation source interacts with the sample under analysis and produces a photoelectric effect that causes the sample to emit certain characteristic X-rays. In addition to this, elastic scattering and inelastic scattering also occur inside the sample and on the support of the sample. In these scattering process will produce a large number of scattered photons. The emergence of scattered photons, on the one hand, limits the detector count rate, thus affecting the collection of the characteristic X-ray spectrum. On the other hand, it will increase the background count of the X-ray spectrum under test and affect the quantitative detection of the intensity of the characteristic spectrum. Statistical analysis showed that in determining the limits of detection