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本文利用电容瞬态法,测量了扩金工艺制备的二极管中金杂质的分布.由泊松方程已知,从电容瞬态法得到的△C可表示为:
In this paper, capacitance transient method was used to measure the distribution of gold impurities in the diode prepared by the gold-doping process.By the Poisson equation, the △ C obtained from the capacitive transient method can be expressed as: