在集成电路发展的早期,固体物理和材料科学是微电子学的基础。目前,化学,特别是包括二个不同相的异相化学(气相和固相)在制造微电子学电路方面起着越来越重要的作用。激光诱导异相化学反应在制作微电子学元器件上应用很广。这些异相化学反应的研究又促进了固体表面光化学反应的研究。激光诱导化学工艺在微电子学应用方面的发展吸引了许多学者。开始是用激光产生化学反应,以制备特殊的化学试剂或者分离同位素。当前激光控制亚毫米范围的反应是一个重要的研究课题。在固体表面固定区域产生的化学反应可能性导致了半导体新工艺的出现。这种化学反应不同 Early in the development of integrated circuits, solid state physics and materials science were the foundations of microelectronics. At present, chemistry, especially heterogeneous chemistry including two different phases (gas phase and solid phase) plays an increasingly important role in the fabrication of microelectronic circuits. Laser-induced heterogeneous chemical reactions are widely used in the fabrication of microelectronic components. These heterogeneous chemical reactions in turn promote the solid surface photochemical reactions. Laser-induced chemical technology in the development of microelectronics applications has attracted many scholars. The beginning is to use the laser to produce chemical reactions to prepare special chemicals or to separate isotopes. The current laser control sub-millimeter range of reactions is an important research topic. The possibility of chemical reactions in the fixed areas of the solid surface leads to the emergence of new semiconductor processes. This chemical reaction is different