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研究一种电容型高分子湿度传感器,选择了耐热好,抗溶剂腐蚀的聚酰亚胺作湿敏薄膜,制成湿度传感器.对传感器的结构、感湿机理进行了讨论。其工作原理是湿度改变引起聚酰亚胺膜介电系数变化从而导致电容变化.对元件的制造工艺和湿敏特性进行了实验研究.认为这种高分子电容湿度传感器是一种性能优良的传感器.它将有着广阔的应用前景.
Study of a capacitive polymer humidity sensor, the choice of a good heat, solvent-resistant polyimide as a moisture-sensitive film, made of humidity sensor. The structure of the sensor, the sensory wetness mechanism are discussed. Its working principle is that the humidity change causes the dielectric constant of the polyimide film to change, resulting in the change of capacitance. The manufacturing process of components and humidity characteristics of the experimental study. That such a polymer capacitive humidity sensor is a good performance sensor. It will have broad application prospects.