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基于ZnO薄膜吸收光谱的温变特性,设计了一种反射式光纤温度传感器。该传感器以镀于蓝宝石三棱镜面上的ZnO薄膜作为敏感材料,采用三棱镜、凸透镜和位于凸透镜焦点处的光纤端面相配合的结构以及相应的反射式光路。室温至500℃范围测试实验表明,所设计的传感器的温度曲线线性拟合度达99.3%以上,灵敏度优于0.05 nm/℃。该传感器的理论测温范围可达10 K~1000 K,稳定性高,适用于实际工作环境中的宽温变范围温度测量。
Based on the temperature change characteristics of ZnO thin film absorption spectrum, a reflective optical fiber temperature sensor is designed. The sensor uses a ZnO thin film plated on a sapphire prism surface as a sensitive material and adopts a structure matched with a prism, a convex lens and an optical fiber end face located at the focus of the convex lens and a corresponding reflective optical path. From room temperature to 500 ℃, the experimental results show that the linearity of the temperature curve of the designed sensor is over 99.3%, and its sensitivity is better than 0.05 nm / ℃. The sensor’s theoretical temperature range of up to 10 K ~ 1000 K, high stability, suitable for the actual work environment wide temperature range of temperature measurement.