振动主动控制是消除干扰和提高机械加工精度的主要手段之一。振动主动控制的前提是对频率在5kHz以上微振动信号进行准确测量。针对现有光纤光栅传感器在测量高频微振动信号上存在的频率低、结构复杂、无法分布式测量等不足,采用频率调制连续波(FMCW)技术结合光强度调制,设计了一种全光纤分布式微振传感器,并通过压电换能器(PZT)微振测量实验和仿真对传感器的性能进行验证,能够分布式测量频率最高为60kHz的微振动信号。 Active vibration control is to eliminate interference and improve the machining accuracy of the main means. The premise of active vibration control is the frequency of 5kHz above the micro-vibration signals for accurate measurement. Aiming at the low frequency, complex structure and inability to measure distributedly, the existing FBG sensors are used to measure high-frequency micro-vibration signals. By using FMCW combined with light intensity modulation, an all-fiber distribution Micro-vibration sensors, and through the piezoelectric transducer (PZT) micro-vibration measurement experiment and simulation to verify the performance of the sensor can be distributed to measure the frequency of micro-vibration signals up to 60kHz.