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在光纤共焦扫描显微镜 (FOCSM)的基础上 ,利用其轴向响应曲线的线性部分 ,给出了一种测定物体微位移的新方法。并用该方法精确测量了压电陶瓷微小的逆压电伸缩效应 ,分辨率可以达到 5nm。
Based on the optical confocal scanning microscope (FOCSM) and using the linear part of its axial response curve, a new method for measuring the micro-displacement of an object is given. And with this method, the tiny reverse piezoelectric effect of piezoceramic can be accurately measured, the resolution can reach 5nm.