用磁控溅射镀膜法制备了Nd靶,研究了Nd靶在不同环境气氛下的氧化过程,并利用X射线光电子能谱、原子力显微镜对表面氧化物的化学态、表面形貌进行了分析和研究,得出Nd靶防氧化主要是防止表面的氢氧化这一结论 Nd target was prepared by magnetron sputtering method. The oxidation process of Nd target under different atmosphere was studied. The chemical state and surface morphology of the surface oxide were analyzed by X-ray photoelectron spectroscopy and atomic force microscope Study, come to Nd target oxidation is mainly to prevent the surface of the hydroxide of this conclusion