一、前言电子探针X射线显微分析仪(Electron probe X-ray microanalyzer,缩写为EPMA或EPA)简称电子探针。它是固体物质显微分析(微区成份、形貌和结构分析)的有力工具。目前电子探针一般都和扫描电镜(SEM)相组合,成为一种综合性的测试分 I. Introduction Electron probe X-ray microanalyzer (abbreviated as EPMA or EPA) is short for electronic probe. It is a powerful tool for the microscopic analysis of solid matter (micro-zone composition, topography and structural analysis). Electron probes are generally combined with scanning electron microscopy (SEM) to form a comprehensive test score