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首次用二维圆柱孔模型研究了多孔硅/聚合物复合膜的光学各向异性,求出了光学各向异性参数。实验上制备出了多孔硅/PMMA复合膜平面波导,采用棱镜耦合m线方法测量了复合膜的折射率。理论分析与实验结果基本相符。研究结果表明,多孔硅膜呈现出正单轴晶体的特征,由TE和TM模射所确定的折射率分别对应寻常光折射率和非寻常光折射率。多孔硅/PMMA复合膜光学各向异性随聚合物嵌入率的增加而减小。光学各向异性也随孔隙率的不同而变化,当初始孔隙率为73%时,光学各向异性参数β取最大值。
For the first time, the optical anisotropy of porous silicon / polymer composite films was investigated by two-dimensional cylindrical pore model, and the optical anisotropy parameters were obtained. Porous silicon / PMMA composite film planar waveguide was prepared experimentally, and the refractive index of the composite film was measured by prism-coupled m-line method. The theoretical analysis is in good agreement with the experimental results. The results show that the porous silicon film exhibits the characteristics of a positive uniaxial crystal. The refractive indices determined by TE and TM modes correspond to the ordinary refractive index and the extraordinary refractive index, respectively. The optical anisotropy of porous Si / PMMA composite films decreases with the increase of polymer intercalation rate. The optical anisotropy also varies with the porosity. When the initial porosity is 73%, the optical anisotropy parameter β takes the maximum value.